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An Introduction to Microelectromechanical Systems Engineering
Product ID: 0890065810
Condition: New
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Product Description
An Introduction to Microelectromechanical Systems Engineering
- Used Book in Good Condition
Provides a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describe in detail the materials used in producing MEMS-including silicon, polymers, and glass and quartz substrates-as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications. DLC: Microelectromechanical systems.
Technical Specifications
Country
USA
Brand
Artech House
Manufacturer
Artech House Publishers
Binding
Hardcover
UnitCount
1
EANs
9780890065815
