An Introduction to Microelectromechanical Systems Engineering

An Introduction to Microelectromechanical Systems Engineering
- Used Book in Good Condition
Provides a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describe in detail the materials used in producing MEMS-including silicon, polymers, and glass and quartz substrates-as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications. DLC: Microelectromechanical systems.
Country USA
Brand Artech House
Manufacturer Artech House Publishers
Binding Hardcover
UnitCount 1
EANs 9780890065815
ReleaseDate 0000-00-00

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