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Atomic Layer Deposition for Semiconductors

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Atomic Layer Deposition for Semiconductors

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Country USA
Brand Springer
Manufacturer Springer
Binding Hardcover
ItemPartNumber 89 black & white illustrations, 81 colou
ReleaseDate 2013-10-19
UnitCount 1
EANs 9781461480532

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Country	USA
Brand	Springer
Manufacturer	Springer
Binding	Hardcover
ItemPartNumber	89 black & white illustrations, 81 colou
ReleaseDate	2013-10-19
UnitCount	1
EANs	9781461480532