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Computational Modeling in Semiconductor Processing (Artech House Materials Science Library)

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Computational Modeling in Semiconductor Processing (Artech House Materials Science Library)
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This text provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition, metal-organic chemical vapour deposition, plasma processing, rapid thermal processing and crystal growth, as well as defining the basic principles of transport phenomena, gas phase and surface reactions in electronics materials processing. In addition, it explains how to apply practical numerical techniques used in process simulation, and presents the numerical methods necessary to produce simulation codes.
Country USA
Brand Artech House
Manufacturer Artech House Publishers
Binding Hardcover
UnitCount 1
EANs 9780890067079
ReleaseDate 0000-00-00

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Country	USA
Brand	Artech House
Manufacturer	Artech House Publishers
Binding	Hardcover
UnitCount	1
EANs	9780890067079
ReleaseDate	0000-00-00