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Field Guide to Optical Lithography
Product ID: 0819462071
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Product Description
Field Guide to Optical Lithography
The material in this Field Guide is a distillation of material put together by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. This Field Guide details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography control and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry.
Contents
- Symbol Glossary
- The Lithgraphy Process
- Image Formation
- Imaging into a Photoresist
- Photoresist Chemistry
- Lithography Control and Optimization
- Equation Summary
- Glossary
- Index
Technical Specifications
Country
USA
Manufacturer
SPIE Publications
Binding
Spiral-bound
Height
7.75
Length
5.25
Weight
0.37919509064
Width
0.5
NumberOfItems
1
