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Microlithography: Science and Technology

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Microlithography: Science and Technology
- Used Book in Good Condition
This self-contained text details both elementary and advanced aspects of submicron microlithography - providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field. Including discussions on electron beam, x-ray, and proximal probe techniques and enhanced with timesaving citations to key sources in the literature and more than 600 tables, equations, drawings, and photographs that clarify the material, the book covers mechanical systems, optics, excimer laser light sources, alignment techniques and analysis, resist chemistry, processing, multilayer lithography, plasma and reactive ion etching, metrology, and more.
Country USA
Brand CRC Press
Manufacturer CRC Press
Binding Hardcover
UnitCount 1
EANs 9780824799533
ReleaseDate 0000-00-00

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Country	USA
Brand	CRC Press
Manufacturer	CRC Press
Binding	Hardcover
UnitCount	1
EANs	9780824799533
ReleaseDate	0000-00-00